|
|
| 气体种类 |
量程 |
峰值报警 |
平均阀值报警 |
危险浓度报警 |
| 氢气 (H 2 ) |
0...1.000 % |
- |
- |
0.01%vol |
| H2 |
0...4.00 % |
- |
- |
0.05%vol |
| 硫化氢(H 2 S) |
0...100ppm |
10ppm |
10ppm |
2ppm |
| H2S |
0...30.0ppm |
10ppm |
10ppm |
0.5ppm |
| 氯气 (Cl 2 ) |
0...5.00ppm |
0.5ppm |
0.5ppm |
0.15ppm |
| 一氧化碳 (CO) |
0...500ppm |
30ppm |
25ppm |
10ppm |
| 氰化氢 (HCN) |
0...30.0ppm |
1.9ppm |
4.7ppm |
1ppm |
| 氯化氢 (HCl) |
0...30.0ppm |
2ppm |
5ppm |
1ppm |
| HCl |
0...30.0ppm |
2ppm |
5ppm |
1ppm |
| 砷烷 (AsH 3 ) |
0...1.00ppm |
- |
0.05ppm |
0.03ppm |
| AsH3 |
0...1.00ppm |
- |
0.05ppm |
0.03ppm |
| AsH3 |
0...10.0ppm |
- |
0.05ppm |
0.5ppm |
| PH3 |
0...1.00ppm |
0.10ppm |
0.30ppm |
0.05ppm |
| 磷烷 (PH 3 ) |
0...1.00ppm |
0.10ppm |
0.30ppm |
0.05ppm |
| 乙硼烷 (B 2 H 6 ) |
0...1.00ppm |
- |
0.10 ppm |
0.05ppm |
| 硅烷(SiH 4 ) |
0...50.0ppm |
- |
5ppm |
1.0ppm |
| 氟气 (F 2 ) |
0...5.00ppm |
0.10ppm |
0.10ppm |
0.03ppm |
| 氟化氢(HF) |
0...10,0ppm |
2ppm |
3ppm |
0.5ppm |
| 氨气(NH 3 ) |
0...50ppm |
20ppm |
25ppm |
1ppm |
| NH3 |
0...1000ppm |
20ppm |
25ppm |
15ppm |
| NH3 |
0...100ppm |
20ppm |
25ppm |
5ppm |
| 六甲基二硅(HMDS) |
0...0.500 % |
- |
- |
0.010%vol |
| HMDS |
0...500ppm |
- |
- |
5ppm |
| 溴气 (Br 2 ) |
0...5.00ppm |
- |
0,1ppm |
0.05ppm |
| 溴化氢 (HBr) |
0...30.0ppm |
2ppm |
3ppm |
1ppm |
| 臭氧(O 3 ) |
0...1.00ppm |
0.10ppm |
0,10ppm |
0.05ppm |
| 二氧化氯(ClO 2 |
0...1.00ppm |
0.10ppm |
0,10ppm |
0.03ppm |
| 三氟化氯 (ClF 3 ) |
0...1.00ppm |
- |
0,10ppm |
0.03ppm |
| 正硅酸乙(TEOS) |
0...100ppm |
10ppm |
10ppm |
5ppm |
| 硼酸三甲酯(TMB) |
0...200ppm |
- |
- |
5ppm |
| 联氨 (N 2 H 4 ) |
0...1.00ppm |
0.10ppm |
0,01ppm |
0.02ppm |
| 磷酸三甲酯(TMP) |
0...30.0ppm |
- |
2,0ppm |
1ppm |
| 三氟化氮(NF3) |
0...50.0ppm |
- |
10ppm |
1ppm |
| 氟甲烷(CH 3 F) |
0...0.500 % |
- |
- |
0.010%vol | |